Signatone manufactures Thermal Chucks (hot and cold) for a wide range of applications:

• Prober mounted or stand-alone Hot Chucks for characterizing wafers and packaged devices at temperatures ranging up to 300°C
• Very high temperature Hot Chuck Systems for up to 600°C. (see below for data)
• -15°C to 70°C Stable Temperature Hot/Cold Fluid Chuck Systems for liquid crystal hot spot detection
• Stand-alone Dark Box Systems for engineering applications
• C/V plotter Hot Chucks Systems for production and engineering
• Ultra high temp (600°C) systems
• Triaxial Hot Chucks for low current probing
• Large area Hot Chucks for flat panel probing
• Stable Temperature Hot/Cold Fluid Chuck Systems
• Triaxial Hot Chucks

Signatone S-1060R 4" Hot Chuck Data Sheet (600°C)

• Temperature Range..................Ambient to 600°C
• Temperature Accuracy..................+/- 1°C
• Temperature Resolution.........1°C
• Temperature Uniformity......................+/- 1°C
• Surface Flatness.................005" TIR across Temp Range
• Surface/Base Expansion..........Typical 0.010" across Temp Range
• Surface to Ground Isolation...106 ohms. ( 1014 ohms available with triax top )
• Surface to Ground Capacitance...................<300pF
• Electrical Noise Floor....................Approx. 10 nA
• Chuck Actual Diameter........................4.5"
• Chuck Height Q chuck......................1.25"